Study of mechanisms involved in photoresist microlens formation
S. Audran; B. Faure; B. Mortini; J. Regolini; G. Schlatter; G. Hadziioannou
- 作者S. Audran; B. Faure; B. Mortini; J. Regolini; G. Schlatter; G. Hadziioannou
- 卷第83卷
- 印刷ISSN0167-9317
- 文件大小225.94KB
- 发表时间2006
- DOI10.1016/j.mee.2006.01.150
- 页码1087-1090