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Synthesis and Tribological Behavior of Silicon Oxycarbonitride Thin Films Derived from Poly(Urea)Methyl Vinyl Silazane

Synthesis and Tribological Behavior of Silicon Oxycarbonitride Thin Films Derived from Poly(Urea)Methyl Vinyl Silazane

Tsali J. Cross; Rishi Raj; Tsali J. Cross; Somuri V. Prasad; David R. Tallant

作者Tsali J. Cross; Rishi Raj; Tsali J. Cross; Somuri V. Prasad; David R. Tallant
卷第3卷
期第2期
印刷ISSN1546-542X
电子ISSN1744-7402
文件大小1033.84KB
发表时间2006
DOI10.1111/j.1744-7402.2006.02070.x
页码113-126

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