Properties of a low-pressure inductive RF discharge II: Mathematical simulations
- 作者A. F. Aleksandrov; K. V. Vavilin; E. A. Kral’kina; V. B. Pavlov; A. A. Rukhadze
- 卷第33卷
- 期第9期
- 印刷ISSN1063-780X
- 电子ISSN1562-6938
- 文件大小354.37KB
- 发表时间2007-09
- DOI10.1134/s1063780x0709005x
- 页码746-756