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[IEEE 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Geneva, Switzerland (2007.05.29-2007.06.1)] 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Energy trapping in extensional thin film MEMS resonators and applications to filtering at UHF frequencies

[IEEE 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Geneva, Switzerland (2007.05.29-2007.06.1)] 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Energy trapping in extensional thin film MEMS resonators and applications to filtering at UHF frequencies

Detaint, J.; Capelle, B.; Epelboin, Y.
  • 作者Detaint, J.; Capelle, B.; Epelboin, Y.
  • 文件大小759.61KB
  • 发表时间2007
  • DOI10.1109/freq.2007.4319062
  • 页码194-198
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