Precise Alignment of Single Nanowires and Fabrication of Nanoelectromechanical Switch and Other Test Structures

• 期刊名称IEEE Transactions On Nanotechnology
• 作者Li, Qiliang; Koo, Sang-Mo; Richter, Curt A.; Edelstein, Monica D.; Bonevich, John E.; Kopanski, Joseph J.; Suehle, John S.; Vogel, Eric M.
• 卷第6卷
• 期第2期
• 印刷ISSN1536-125X
• 文件大小1584.84KB
• 发表时间2007-03
• DOI10.1109/TNANO.2007.891827
• 页码256-262