New developments in through-mask electrochemical micromachining of titanium
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Kern, P; Veh, J; Michler, J
- 卷第17卷
- 期第6期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1737.73KB
- 发表时间2007-06-01
- DOI10.1088/0960-1317/17/6/010
- 页码1168-1177
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