[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator
- 作者Masanao Tani, ; Masahiro Akamatsu, ; Yoshiaki Yasuda, ; Hiroshi Toshiyoshi,
- 文件大小2166.04KB
- 发表时间2007
- DOI10.1109/MEMSYS.2007.4432994
- 页码699-702
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