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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology

[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology

Teva, J.; Abadal, G.; Uranga, A.; Verd, J.; Torres, F.; L.Lopez, J.; Esteve, J.; Perez-Murano, F.; Barniol, N.
  • 作者Teva, J.; Abadal, G.; Uranga, A.; Verd, J.; Torres, F.; L.Lopez, J.; Esteve, J.; Perez-Murano, F.; Barniol, N.
  • 文件大小1859.29KB
  • 发表时间2007
  • DOI10.1109/MEMSYS.2007.4433091
  • 页码779-782
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