[IEEE 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Nara-city, Japan (2007.05.27-2007.05.31)] 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Atomic layer deposition of PbTiO3 and its component oxide films
- 作者Lee, Hyun Ju; Hwang, Gyu Weon; Lee, Keun; Kim, Gun Hwan; Hwang, Cheol Seong
- 文件大小3452.59KB
- 发表时间2007
- DOI10.1109/isaf.2007.4393198
- 页码152-155
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