Thin-Film Encapsulated RF MEMS Switches
- 期刊名称Journal of Microelectromechanical Systems
- 作者Leedy, K.D.; Strawser, R.E.; Cortez, R.; Ebel, J.L.
- 卷第16卷
- 期第2期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小2124.38KB
- 发表时间2007-4
- DOI10.1109/jmems.2007.892915
- 页码304-309
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