Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

• 作者Zhi Yan; Yi Ming Mi; Zhi Tang Song; Wei Li Liu; Hong Ji; Song Lin Feng
• 卷第400卷
• 印刷ISSN0921-4526
• 文件大小523.21KB
• 发表时间2007
• DOI10.1016/j.physb.2007.06.028
• 页码38-41