[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing
- 作者Kubo, T.; Sukegawa, T.; Takii, E.; Yamamoto, T.; Satoh, S.; Kase, M.
- 文件大小1573.84KB
- 发表时间2007
- DOI10.1109/rtp.2007.4383861
- 页码321-326
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