Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
- 期刊名称Journal of Microelectromechanical Systems
- 作者Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
- 卷第16卷
- 期第2期
- 印刷ISSN1057-7157
- 文件大小1283.78KB
- 发表时间2007-04
- DOI10.1109/jmems.2006.889503
- 页码319-328
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