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Vacuum measurement on vacuum packaged MEMS devices

Vacuum measurement on vacuum packaged MEMS devices

Gan, Zhiyin; Lin, Dong; Wang, Xuefang; Chenggang, ; Zhang, Honghai; Liu, Sheng

期刊名称Journal of Physics: Conference Series
作者Gan, Zhiyin; Lin, Dong; Wang, Xuefang; Chenggang, ; Zhang, Honghai; Liu, Sheng
卷第48卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小988.90KB
发表时间2007-07-01
DOI10.1088/1742-6596/48/1/264
页码1429-1434

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