Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst

Arima, Kenta; Hara, Hideyuki; Murata, Junji; Ishida, Takeshi; Okamoto, Ryota; Yagi, Keita; Sano, Yasuhisa; Mimura, Hidekazu; Yamauchi, Kazuto

期刊名称Applied Physics Letters
作者Arima, Kenta; Hara, Hideyuki; Murata, Junji; Ishida, Takeshi; Okamoto, Ryota; Yagi, Keita; Sano, Yasuhisa; Mimura, Hidekazu; Yamauchi, Kazuto
卷第90卷
期第20期
印刷ISSN0003-6951
文件大小511.91KB
发表时间2007
DOI10.1063/1.2739084

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