Electrical Frequency Tuning of Film Bulk Acoustic Resonator
- 期刊名称Journal of Microelectromechanical Systems
- 作者Pang, Wei; Zhang, Hao; Yu, Hongyu; Lee, Chuang-Yuan; Kim, Eun Sok
- 卷第16卷
- 期第6期
- 印刷ISSN1057-7157
- 文件大小2761.38KB
- 发表时间2007-12
- DOI10.1109/jmems.2006.885846
- 页码1303-1313
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