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First principles study of the HfO[sub 2]∕SiO[sub 2] interface: Application to high-k gate structures

First principles study of the HfO[sub 2]∕SiO[sub 2] interface: Application to high-k gate structures

Ha, Jeong-Hee; McIntyre, Paul C.; (KJ) Cho, Kyeongjae
  • 期刊名称Journal of Applied Physics
  • 作者Ha, Jeong-Hee; McIntyre, Paul C.; (KJ) Cho, Kyeongjae
  • 卷第101卷
  • 期第3期
  • 印刷ISSN0021-8979
  • 文件大小698.95KB
  • 发表时间2007
  • DOI10.1063/1.2433696
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