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Modeling of magnetically enhanced capacitively coupled plasma sources: Two frequency discharges

Modeling of magnetically enhanced capacitively coupled plasma sources: Two frequency discharges

Yang, Yang; Kushner, Mark J.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Yang, Yang; Kushner, Mark J.
卷第25卷
期第5期
印刷ISSN0734-2101
文件大小3640.51KB
发表时间2007
DOI10.1116/1.2771558

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