[IEEE 2007 American Control Conference - New York, NY, USA (2007.07.9-2007.07.13)] 2007 American Control Conference - Modeling and Distributed Control of an Electrostatically Actuated Microcantilever Array
- 作者Sarwar, Azeem; Voulgaris, Petros G.; Salapaka, Srinivasa M.
- 文件大小874.25KB
- 发表时间2007
- DOI10.1109/acc.2007.4283093
- 页码4240-4245
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