[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Highly-Mobile 2D Micro Impact Actuator for Space Applications
Mita, Makoto; Takahashi, Kazuhiro; Ataka, Manabu; Fujita, Hiroyuki; Toshiyoshi, Hiroshi
- 作者Mita, Makoto; Takahashi, Kazuhiro; Ataka, Manabu; Fujita, Hiroyuki; Toshiyoshi, Hiroshi
- 文件大小3025.25KB
- 发表时间2007
- DOI10.1109/sensor.2007.4300220
- 页码675-678