Photo-resist ashing by atmospheric pressure glow discharge
- 期刊名称Current Applied Physics
- 作者Kun H. Han; Jung G. Kang; Han S. Uhm; Bang K. Kang
- 卷第7卷
- 期第2期
- 印刷ISSN1567-1739
- 文件大小265.15KB
- 发表时间2007
- DOI10.1016/j.cap.2006.04.002
- 页码211-214
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