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Dielectric Films for Advanced Microelectronics || Integration of Low-k Dielectric Films in Damascene Processes

Dielectric Films for Advanced Microelectronics || Integration of Low-k Dielectric Films in Damascene Processes

Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen

作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
文件大小4873.01KB
发表时间2007
DOI10.1002/9780470017944.ch5
页码199-250

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