Thermal conduction from microcantilever heaters in partial vacuum
Lee, Jungchul; Wright, Tanya L.; Abel, Mark R.; Sunden, Erik O.; Marchenkov, Alexei; Graham, Samuel; King, William P.
- 期刊名称Journal of Applied Physics
- 作者Lee, Jungchul; Wright, Tanya L.; Abel, Mark R.; Sunden, Erik O.; Marchenkov, Alexei; Graham, Samuel; King, William P.
- 卷第101卷
- 期第1期
- 印刷ISSN0021-8979
- 文件大小820.73KB
- 发表时间2007
- DOI10.1063/1.2403862