Stress evolution during Ni–Si compound formation for fully silicided (FUSI) gates

C. Torregiani; C. Van Bockstael; C. Detavernier; C. Lavoie; A. Lauwers; K. Maex; J.A. Kittl

作者C. Torregiani; C. Van Bockstael; C. Detavernier; C. Lavoie; A. Lauwers; K. Maex; J.A. Kittl
卷第84卷
期第11期
印刷ISSN0167-9317
文件大小366.89KB
发表时间2007
DOI10.1016/j.mee.2007.05.054
页码2533-2536

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