[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Cu-CMP Engineering Challenges for the 65 nm Technology Nodes and Beyond
Petitdidier, Sebastien; Mellier, Maxime; Guiheux, Denis; Juhel, Marc
- 作者Petitdidier, Sebastien; Mellier, Maxime; Guiheux, Denis; Juhel, Marc
- 卷第11卷
- 文件大小704.67KB
- 发表时间2007
- DOI10.1149/1.2779407
- 页码431-440