Monte Carlo Simulation of Projection Electron Beam Lithography
- 期刊名称Solid State Phenomena
- 作者Sun, X.; Xiao, P.; Ding, Z.J.
- 电子ISSN1662-9779
- 文件大小337.62KB
- 发表时间2007
- DOI10.4028/www.scientific.net/SSP.121-123.1097
- 页码1097-1102
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