Preparation and characterization of wafer scale lead zirconate titanate film for MEMS application

• 作者Jian Lu; Yi Zhang; Takeshi Kobayashi; Ryutaro Maeda; Takashi Mihara
• 卷第139卷
• 印刷ISSN0924-4247
• 文件大小950.22KB
• 发表时间2007
• DOI10.1016/j.sna.2006.10.031
• 页码152-157