SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - Experimental validation of 20nm sensitivity of singular beam microscopy
- 作者Spektor, Boris; Normatov, Alexander; Shamir, Joseph; Osten, Wolfgang; Gorecki, Christophe; Novak, Erik L.
- 卷第6616卷
- 印刷ISSN0277-786X
- 文件大小223.11KB
- 发表时间2007
- DOI10.1117/12.728539
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