Elastic Properties of Several Silicon Nitride Films
- 期刊名称MRS Proceedings
- 作者Liu, Xiao; Metcalf, Thomas H; Wang, Qi; Photiadis, Douglas M
- 卷第989卷
- 电子ISSN1946-4274
- 文件大小157.12KB
- 发表时间2007-1
- DOI10.1557/PROC-0989-A22-01
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