SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Sharp trench waveguide bend with photonic crystals: simulation, fabrication and characterization
Cui, Xudong; Hafner, Christian; Robin, Franck; Erni, Daniel; Tavzarashvili, Kakhaber; Vahldieck, Ruediger; Bosse, Harald; Bodermann, Bernd; Silver, Richard M.
- 作者Cui, Xudong; Hafner, Christian; Robin, Franck; Erni, Daniel; Tavzarashvili, Kakhaber; Vahldieck, Ruediger; Bosse, Harald; Bodermann, Bernd; Silver, Richard M.
- 卷第6617卷
- 印刷ISSN0277-786X
- 文件大小493.40KB
- 发表时间2007
- DOI10.1117/12.726017