Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition

• 作者Ming Xu; Xun Cai; Jun Zhao; Qiulong Chen; Paul K. Chu
• 卷第516卷
• 印刷ISSN0040-6090
• 文件大小520.60KB
• 发表时间2007
• DOI10.1016/j.tsf.2007.05.052
• 页码252-256