[ECS 22nd Symposium on Microelectronics Technology and Devices - Rio De Janiero, Brasil (September 3 - September 6, 2007)] ECS Transactions - Sidewall Angle Influence on the FinFET Analog Parameters
- 作者Giacomini, R.; Martino, Joao A.; Pavanello, Marcelo A.
- 卷第9卷
- 文件大小160.12KB
- 发表时间2007
- DOI10.1149/1.2766872
- 页码37-45
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