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Characterization of all-Nb nanodevices fabricated by electron beam lithography and ion beam oxidation

Characterization of all-Nb nanodevices fabricated by electron beam lithography and ion beam oxidation

H. Im; Y. A. Pashkin; T. Yamamoto; O. Astafiev; Y. Nakamura; J. Tsai

作者H. Im; Y. A. Pashkin; T. Yamamoto; O. Astafiev; Y. Nakamura; J. Tsai
文件大小743.54KB
发表时间2007
DOI10.1116/1.2715971

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