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Amorphous CuxGa1-xO Film Deposition by Ultrahigh Vacuum Radio Frequency Magnetron Sputtering

Amorphous CuxGa1-xO Film Deposition by Ultrahigh Vacuum Radio Frequency Magnetron Sputtering

H. Ishikawa; N. Takeuchi; N. Okuda; T. Takeuchi; Y. Horikoshi

作者H. Ishikawa; N. Takeuchi; N. Okuda; T. Takeuchi; Y. Horikoshi
文件大小189.52KB
发表时间2007
DOI10.1143/JJAP.46.2527

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