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Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna

Optimum Frequency for Inductively Coupled Plasma Generation with a Single-Loop Antenna

K. Kusaba; Y. Kitamura; H. Shindo

作者K. Kusaba; Y. Kitamura; H. Shindo
文件大小139.60KB
发表时间2007
DOI10.1143/JJAP.46.L1212

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