SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
- 作者Han, Jong H.; Rajagopalan, Jagannathan; Saif, M. Taher A.; Tadigadapa, Srinivas A.; Ghodssi, Reza; Henning, Albert K.
- 卷第6464卷
- 印刷ISSN0277-786X
- 文件大小587.03KB
- 发表时间2007
- DOI10.1117/12.706115
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