Electron Tomography of Semiconductor Devices
- 期刊名称Microscopy and Microanalysis
- 作者Ercius, P; Muller, DA; Weyland, M; Gignac, L
- 卷第13卷
- 印刷ISSN1431-9276
- 电子ISSN1435-8115
- 文件大小583.07KB
- 发表时间2007-8
- DOI10.1017/s143192760707674x
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