Mechanics of microelectronics structures as revealed by X-ray diffraction
Murray, Conal E.; Yan, H.; Noyan, I. C.
- 期刊名称Powder Diffraction
- 作者Murray, Conal E.; Yan, H.; Noyan, I. C.
- 卷第22卷
- 期第2期
- 印刷ISSN0885-7156
- 电子ISSN1945-7413
- 文件大小374.29KB
- 发表时间2007-6
- DOI10.1154/1.2737460
- 页码98-102