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Low cross talk design and simple fabrication process of electrostatic vertical comb-drive actuators for positioning application

Low cross talk design and simple fabrication process of electrostatic vertical comb-drive actuators for positioning application

Michael Zickar; Makoto Mita; Manabu Ataka; Hiroyuki Fujita
  • 作者Michael Zickar; Makoto Mita; Manabu Ataka; Hiroyuki Fujita
  • 卷第2卷
  • 期第3期
  • 印刷ISSN1931-4973
  • 电子ISSN1931-4981
  • 文件大小139.05KB
  • 发表时间2007
  • DOI10.1002/tee.20167
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