SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation
- 作者Normatov, Alexander; Bosse, Harald; Bodermann, Bernd; Spektor, Boris; Shamir, Joseph; Silver, Richard M.
- 卷第6617卷
- 印刷ISSN0277-786X
- 文件大小171.35KB
- 发表时间2007
- DOI10.1117/12.728543
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