UV Nanoimprint Lithography and Its Application for Nanodevices
Fukuhara, Makoto; Ono, Hiroshi; Hirasawa, Tamano; Otaguchi, Makoto; Sakai, Nobuji; Mizuno, Jun; Shoji, Shuichi
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Fukuhara, Makoto; Ono, Hiroshi; Hirasawa, Tamano; Otaguchi, Makoto; Sakai, Nobuji; Mizuno, Jun; Shoji, Shuichi
- 卷第20卷
- 期第4期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小757.25KB
- 发表时间2007
- DOI10.2494/photopolymer.20.549
- 页码549-554