An Examination of Athermal Photonic Effects on Boron Diffusion and Activation During Microwave Rapid Thermal Processing
- 期刊名称Journal of Microwave Power and Electromagnetic Energy
- 作者Bonifas, Christopher J.; Thompson, Keith; Booske, John H.; Cooper, Reid F.
- 卷第42卷
- 期第1期
- 印刷ISSN0832-7823
- 文件大小3506.60KB
- 发表时间2007-01
- DOI10.1080/08327823.2007.11688577
- 页码23-34
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