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MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

A. Mehdaoui; M. B. Pisani; D. Tsamados; F. Casset; P. Ancey; A. M. Ionescu

作者A. Mehdaoui; M. B. Pisani; D. Tsamados; F. Casset; P. Ancey; A. M. Ionescu
卷第13卷
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小323.98KB
发表时间2007-07
DOI10.1007/s00542-006-0350-5
页码1589-1594

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