ITO films deposited by facing target sputtering
Osamu Kamiya; Yusuke Onai; Hiro-omi Kato; Yoichi Hoshi
- 作者Osamu Kamiya; Yusuke Onai; Hiro-omi Kato; Yoichi Hoshi
- 卷第18卷
- 印刷ISSN0957-4522
- 电子ISSN1573-482X
- 文件大小412.59KB
- 发表时间2007-10
- DOI10.1007/s10854-007-9240-6
- 页码359-362