[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Effects of Si-nanocrystal formation in dielectric layers on reliability of RF MEMS switches
Linxian Zhan, ; Haisheng San, ; Gang Li, ; Peng Xu, ; Xuyuan Chen,
- 作者Linxian Zhan, ; Haisheng San, ; Gang Li, ; Peng Xu, ; Xuyuan Chen,
- 文件大小354.13KB
- 发表时间2008
- DOI10.1109/nems.2008.4484392
- 页码548-551