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Measurement of voltage and current in continuous and pulsed rf and dc glow discharges

Measurement of voltage and current in continuous and pulsed rf and dc glow discharges

Hoffmann, V; Efimova, V V; Voronov, M V; Šmíd, P; Steers, E B M; Eckert, J
  • 期刊名称Journal of Physics: Conference Series
  • 作者Hoffmann, V; Efimova, V V; Voronov, M V; Šmíd, P; Steers, E B M; Eckert, J
  • 卷第133卷
  • 电子ISSN1742-6596
  • 文件大小895.74KB
  • 发表时间2008-10-01
  • DOI10.1088/1742-6596/133/1/012017
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