Measurement of voltage and current in continuous and pulsed rf and dc glow discharges
Hoffmann, V; Efimova, V V; Voronov, M V; Šmíd, P; Steers, E B M; Eckert, J
- 期刊名称Journal of Physics: Conference Series
- 作者Hoffmann, V; Efimova, V V; Voronov, M V; Šmíd, P; Steers, E B M; Eckert, J
- 卷第133卷
- 电子ISSN1742-6596
- 文件大小895.74KB
- 发表时间2008-10-01
- DOI10.1088/1742-6596/133/1/012017