Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable contact point

• 期刊名称Journal of Micromechanics and Microengineering
• 作者Cai, Haogang; Ding, Guifu; Yang, Zhuoqing; Su, Zhijuan; Zhou, Jiansheng; Wang, Hong
• 卷第18卷
• 期第11期
• 印刷ISSN0960-1317
• 电子ISSN1361-6439
• 文件大小2549.76KB
• 发表时间2008-11-01
• DOI10.1088/0960-1317/18/11/115033