Bandgap engineering of tunnel oxide with multistacked layers of Al[sub 2]O[sub 3]/HfO[sub 2]/SiO[sub 2] for Au-nanocrystal memory application
Lo, Yun-Shan; Liu, Ke-Chih; Wu, Jyun-Yi; Hou, Cheng-Hao; Wu, Tai-Bor
- 期刊名称Applied Physics Letters
- 作者Lo, Yun-Shan; Liu, Ke-Chih; Wu, Jyun-Yi; Hou, Cheng-Hao; Wu, Tai-Bor
- 卷第93卷
- 期第13期
- 印刷ISSN0003-6951
- 文件大小731.29KB
- 发表时间2008
- DOI10.1063/1.2995862