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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A new paradigm for high resolution 3D lithography

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A new paradigm for high resolution 3D lithography

Mosher, L. A.; Waits, C. M.; Morgan, B.; Ghodssi, R.

作者Mosher, L. A.; Waits, C. M.; Morgan, B.; Ghodssi, R.
文件大小521.30KB
发表时间2008
DOI10.1109/memsys.2008.4443676
页码395-398

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