Fast thermal nanoimprint lithography by a stamp with integrated heater

• 作者Massimo Tormen; Radu Malureanu; Rasmus Haugstrup Pedersen; Lasse Lorenzen; Kristian Hagsted Rasmussen; Christopher James Lüscher; Anders Kristensen; Ole Hansen
• 卷第85卷
• 印刷ISSN0167-9317
• 文件大小655.08KB
• 发表时间2008
• DOI10.1016/j.mee.2008.01.065
• 页码1229-1232